Microwave Diagnostic Results From the Gaseous Electronics Conference Rf Reference Cell
نویسندگان
چکیده
منابع مشابه
Microwave Diagnostic Results from the Gaseous Electronics Conference RF Reference Cell
Electron density measurements with even the simplest microwave interferometry techniques can range over three to four orders of magnitude, can be responsive on time scales as fast as 50 ns, and are simple to obtain and interpret. Three groups have published electron density data taken in the Gaseous Electronics Conference (GEC) reference reactor using microwave interferometry. The agreement in ...
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This paper provides an introduction to the Gaseous Electronics Conference (GEC) RF Reference Cell, and to the articles published in this Special Issue of the Journal of Research of the National Institute of Standards and Technology. A brief summary of the history and purpose of the Reference Cell concept is presented, and recent changes to the GEC Cell design are documented. The paper concludes...
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A review is presented of kinetic-energy distribution measurements for ions striking grounded surfaces in a Gaseous Electronics Conference (GEC) rf Reference Cell. Two experimental arrangements that have been used to measure ion energies in the GEC Cell are described, and a comparison of their performance under different operating conditions is presented. Significant results from ion-energy anal...
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ژورنال
عنوان ژورنال: Journal of Research of the National Institute of Standards and Technology
سال: 1995
ISSN: 1044-677X
DOI: 10.6028/jres.100.030